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91.
基于分步式压印光刻的激光干涉仪纳米级测量及误差研究 总被引:1,自引:1,他引:0
针对在未做隔离保护处理的环境中,基于Michelson干涉原理的激光干涉仪测量系统存在严重的干扰误差,不适合分步式压印光刻纳米级对准测量的要求.采用Edlen公式的分析及计算,不仅在理论上揭示出环境温度、湿度、气压等变化对激光干涉仪测量准确度的影响,而且证明影响测量准确度的最大干扰源是空气流动的结果.通过气流隔离措施和系统测量反馈校正控制器,能够实时补偿激光干涉仪两路信号的相差.最终,测量漂移误差在10 min内由13 nm降低到5 nm以内,满足压印光刻在100 mm行程中达到20 nm定位准确度要求. 相似文献
92.
Using elementary graded automorphisms of polytopal algebras (essentially the coordinate rings of projective toric varieties)
polyhedral versions of the group of elementary matrices and the Steinberg and Milnor groups are defined. They coincide with
the usual K-theoretic groups in the special case when the polytope is a unit simplex and can be thought of as compact/polytopal substitutes
for the tame automorphism groups of polynomial algebras. Relative to the classical case, many new aspects have to be taken
into account. We describe these groups explicitly when the underlying polytope is 2-dimensional. Already this low-dimensional
case provides interesting classes of groups.
Received: 13 December 2001 / Revised version: 24 June 2002
The second author was supported by the Deutsche Forschungsgemeinschaft, INTAS grant 99-00817 and TMR grant ERB FMRX CT-97-0107
Mathematics Subject Classification (2000): 14L27, 14M25, 19C09, 52B20 相似文献
93.
王巨平 《中国科学A辑(英文版)》2002,45(7):827-835
This paper verifies the singularity conjecture for Jacobi forms with higher degree in some typical cases, and gives constructions
for the Jacobi cusp forms whose Fourier coefficients can be expressed by some kind of Rankin-typeL-series. 相似文献
94.
95.
Soliton interaction under the influence of higher-order effects 总被引:6,自引:0,他引:6
In this paper, we present exact N-soliton solution by employing simple, straightforward Darboux transformation based on the Lax pair for Hirota equation, a higher-order nonlinear Schrödinger (HNLS) equation. As examples, one- and two-soliton solutions in explicit forms are given and their properties are also analyzed. A bound solution without interaction will be theoretically predicted if one can adjust frequency shift for each soliton appropriately. Further, we obtain the approximate eigenvalues by employing two-soliton solution and discuss analytically the interaction between neighboring solitons under the influence of the higher-order effects. It is shown that the combined effects of the higher-order effects can restrain the interaction between neighboring solitons to some extent. The results are proved by directly solving HNLS equation numerically. 相似文献
96.
It is explicitly shown that if phase transition occurs at the core of a newborn neutron star with moderately strong magnetic
field strength, which populates only the electron’s Landau levels, then in the β -equilibrium condition, the quark core is
energetically much more unstable than the neutron matter of identical physical condition. 相似文献
97.
By using two sections of erbium doped fiber and a fiber optical reflector, a novel, highly efficient L bandamplifier is demonstrated with significantly power-conversion-efficiency enhancement and the gain increasing of as much as 13 dB. 相似文献
98.
99.
For more than 25 yearsJΨ production has helped to sharpen our understanding of QCD. In proton induced reaction some observations are rather well understood
while others are still unclear. The current status of the theory ofJΨ production will be sketched, paying special attention to the issues of formation time andJΨ re-interaction in a nuclear medium. 相似文献
100.
During the course of our investigation of the electron transfer properties of some redox species through highly hydrophobic
long chain alkanethiol molecules on gold in aqueous and non-aqueous solvents, we obtained some intriguing results such as
unusually low interfacial capacitance, very high values of impedance and film resistance, all of which pointed to the possible
existence of a nanometer size interfacial gap between the hydrophobic monolayer and aqueous electrolyte. We explain this phenomenon
by a model for the alkanethiol monolayer—aqueous electrolyte interface, in which the extremely hydrophobic alkanethiol film
repels water molecules adjacent to it and in the process creates a shield between the monolayer film and water. This effectively
increases the overall thickness of the dielectric layer that is manifested as an abnormally low value of interfacial capacitance.
This behaviour is very much akin to the ‘drying transition’ proposed by Lum, Chandler and Weeks in their theory of length
scale dependent hydrophobicity. For small hydrophobic units consisting of apolar solutes, the water molecules can reorganize
around them without sacrificing their hydrogen bonds. Since for an extended hydrophobic unit, the existence of hydrogen bonded
water structure close to it is geometrically unfavourable, there is a net depletion of water molecules in the vicinity leading
to the possible creation of a hydrophobic interfacial gap. 相似文献